CVD process: Precision and purity through chemical vapour deposition

With our innovative CVD process and state-of-the-art gas-to-solid process, we offer first-class solutions for the production of components made of pyrolytic boron nitride (PBN) and graphite (PG). Thanks to decades of expertise and certified quality assurance, we fulfil the highest requirements of our customers.

The gas-to-solid process: Key technology for the CVD process

The gas-to-solid process forms the basis for the production of high-purity solids. Gases are vaporised in a vacuum at high temperatures and then deposited on a mould as thin layers of solid material - for example pyrolytic boron nitride or pyrolytic graphite. This technology enables customised materials with unique properties.

[Translate to English:] Ablauf des CVD Beschichtungsverfahrens

1: Graphite mandrels
2: Boron halides (BF3 and BCI3), ammonia (NH3) and nitrogen (N2) or hydrocarbons (boron halides, NH3 and N2)
3: Heater
4: Pump
5: Gas scrubber

The CVD coating process

Our CVD (Chemical Vapour Deposition) coating process uses high-purity gases such as:

  • Boron halides (BF₃, BCl₃),
  • ammonia (NH₃),
  • hydrocarbons (CxHy)
  • Nitrogen (N₂)

The gases react under controlled conditions in the reactor and coat the graphite mandrel used in the process. Depending on customer requirements, either a free-standing PBN component solution or a protective coating on the graphite is created. The parts are then specially processed according to customer requirements before they are cleaned, packaged and then prepared for dispatch.

High chemical stability

Our products guarantee maximum process reliability thanks to their exceptional chemical resistance.

Outstanding purity

With a purity of over 99.99%, our materials fulfil the highest quality requirements.

Low outgassing in ultra-high vacuum (UHV)

Even under extreme conditions, our CVD products remain stable and reliable.

Anisotropic structure

Thanks to the crystalline orientation, the products offer ideal direction-dependent properties, e.g. for thermal expansion.

Low thermal mass

Our materials store hardly any heat and release it efficiently.
 

Electrical insulator

PBN is an excellent insulator for current-carrying components.

Machinability

Our CVD products can be easily further processed and customised.

Thermal shock compatibility

Strong temperature fluctuations are no problem for our products.

Flexibility

The components are robust and at the same time flexible for a wide range of applications.

Transparency for infrared waves

PBN crucibles are permeable to infrared light and enable seamless IR processes.

Highest standards in production using the CVD process

All CVT products manufactured using the CVD process undergo stringent production processes that guarantee the highest precision and quality. Our components made of pyrolytic boron nitride and pyrolytic graphite are characterised by their purity, durability and versatility.

The CVD coating process for your requirements

Our CVD process combines state-of-the-art technology with decades of expertise. Whether protective coating or free-standing component - with our gas-to-solid technology and the unique properties of our products, you can rely on quality and innovation.